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|ITEM METADATA RECORD
|Title: ||Characterization and integration in Cu damascene structures of aurora, an in-organic low-k dielectric|
|Authors: ||Donaton, R. A|
Bakklanov, M. R
De Roest, David
|Issue Date: ||2000 |
|Conference: ||MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; 2|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
Electrical Engineering - miscellaneous
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