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Title: Characterization and integration in Cu damascene structures of aurora, an in-organic low-k dielectric
Authors: Donaton, R. A
Coenegrachts, Bart
Sleeckx, Erik
Schaekers, Marc
Sophie, Guus
Matsuki, N
Bakklanov, M. R
Beyer, Gerald
Struyf, Herbert
Vanhaelemeersch, Serge
Stucchi, Michele
De Roest, David
Maex, Karen
Issue Date: 2000
Conference: MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; 2
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous

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