|ITEM METADATA RECORD
|Title: ||The IMEC-Clean: A clean for advanced CMOS manufacturing|
|Authors: ||Meuris, Marc|
De Gendt, Stefan
|Issue Date: ||2000 |
|Conference: ||7th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal; 19-21 June 2000; Newark, NJ, USA. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
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