The IMEC-Clean: A clean for advanced CMOS manufacturing
Publication date:
2000-01-01
Author:
Meuris, Marc
Arnauts, Sophia ; Cornelissen, Ingrid ; Kenis, Karine ; Lux, Marcel ; De Gendt, Stefan ; Mertens, Paul ; Teerlinck, Ivo ; Vos, Rita ; Loewenstein, Lee ; Heyns, Marc ; Wolke, K