Title: P implantation on doping of Ge: diffusion, activation, re-crystallization
Authors: Satta, Alessandra
Janssens, Tom
Clarysse, Trudo
Simoen, Eddy
Meuris, Marc
Benedetti, Alessandro
Hoflijk, Ilse
De Jaeger, Brice
Demeurisse, Caroline
Vandervorst, Wilfried
Issue Date: 2005
Conference: USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous

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