USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, Location: Leuven Belgium
Publication date:
2005-01-01
Author:
Satta, Alessandra
Janssens, Tom ; Clarysse, Trudo ; Simoen, Eddy ; Meuris, Marc ; Benedetti, Alessandro ; Hoflijk, Ilse ; De Jaeger, Brice ; Demeurisse, Caroline ; Vandervorst, Wilfried