|ITEM METADATA RECORD
|Title: ||Physical characterisation of high-gate stacks|
|Authors: ||Vandervorst, Wilfried|
De Gendt, Stefan
|Issue Date: ||2002 |
|Conference: ||MRS Fall Meeting Symposium N: Novel Materials and Processes for Advanced CMOS location:Leuven Belgium date:02/12/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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