ITEM METADATA RECORD
Title: Physical characterisation of high-gate stacks
Authors: Vandervorst, Wilfried
Bender, Hugo
Conard, Thierry
Richard, Olivier
Zhao, Chao
Brijs, Bert
Caymax, Matty
De Gendt, Stefan
Cosnier, Vincent
Chen, Jerry
Kluth, J
Cartier, Eduard
Green, Martin
Issue Date: 2002
Conference: MRS Fall Meeting Symposium N: Novel Materials and Processes for Advanced CMOS location:Leuven Belgium date:02/12/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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