Physical characterisation of high-gate stacks
Publication date:
2002-01-01
Author:
Vandervorst, Wilfried
Bender, Hugo ; Conard, Thierry ; Richard, Olivier ; Zhao, Chao ; Brijs, Bert ; Caymax, Matty ; De Gendt, Stefan ; Cosnier, Vincent ; Chen, Jerry ; Kluth, J ; Cartier, Eduard ; Green, Martin