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Title: Characterization of different tip materials for SCM
Authors: Duhayon, Natasja ×
Fouchier, Marc
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 2003
Host Document: pages:213
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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