Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., Location: Leuven Belgium
Publication date:
2003-01-01
Pages:
213 -
Author:
Duhayon, Natasja
Fouchier, Marc ; Vandervorst, Wilfried ; Hellemans, Louis