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Title: Ni-based silicides: material issues for advanced CMOS applications
Authors: Kittl, Jorge
Lauwers, Anne
Chamirian, Oxana
Van Dal, Mark
Akheyar, Amal
Richard, Olivier
Lisoni, Judit
de Potter de ten Broeck, Muriel
Lindsay, Richard
Maex, Karen #
Issue Date: 2003
Publisher: ECS
Conference: Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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