This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Ni-based silicides: material issues for advanced CMOS applications|
|Authors: ||Kittl, Jorge|
Van Dal, Mark
de Potter de ten Broeck, Muriel
Maex, Karen #
|Issue Date: ||2003 |
|Conference: ||Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.