Advanced Short-Time Thermal Processing for Si-based CMOS devices, Location: Paris France
Publication date:
2003-01-01
Publisher:
ECS
Author:
Kittl, Jorge
Lauwers, Anne ; Chamirian, Oxana ; Van Dal, Mark ; Akheyar, Amal ; Richard, Olivier ; Lisoni, Judit ; de Potter de ten Broeck, Muriel ; Lindsay, Richard ; Maex, Karen