Title: Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
Authors: De Gendt, Stefan
Huber, A
Onsia, Bart
Arnauts, Sophia
Kenis, Karine
Knotter, D. M
Mertens, Paul
Heyns, Marc
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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