4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium., Location: Leuven Belgium
Publication date:
1998-01-01
Author:
De Gendt, Stefan
Huber, A ; Onsia, Bart ; Arnauts, Sophia ; Kenis, Karine ; Knotter, DM ; Mertens, Paul ; Heyns, Marc