ITEM METADATA RECORD
Title: Recent Progress in Advanced In-line Metrology For High-Mobility Semiconductors
Authors: Schulze, Andreas
Loo, Roger
Meersschaut, Johan
van Dorp, Dennis
Gachet, David
Berney, Jean
Vandervorst, Wilfried
Caymax, Matty
Issue Date: 2015
Host Document: Frontiers of Characterization and Metrology for Nanoelectronics - FCMN
Conference: Frontiers of Characterization and Metrology for Nanoelectronics - FCMN location:Dresden Germany date:2015-04-14
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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