Title: Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Authors: Van Besien, Els
Singh, Arjun
Barbarin, Yohan
Verdonck, Patrick
Dekkers, Harold
Vanstreels, Kris
de Marneffe, Jean-Francois
Baklanov, Mikhaïl
Van Elshocht, Sven
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:120 pages:221-224
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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