Microelectronic Engineering
Publication date:
2014-01-01
Volume:
120
Pages:
221 -
224
Publisher:
North-Holland
Author:
Van Besien, Els
Singh, Arjun ; Barbarin, Yohan ; Verdonck, Patrick ; Dekkers, Harold ; Vanstreels, Kris ; de Marneffe, Jean-Francois ; Baklanov, Mikhaïl ; Van Elshocht, Sven
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, SiCO, Low-k, Copper barrier, TDDB, Moisture barrier, Copper interconnects, PECVD, 0204 Condensed Matter Physics, 0299 Other Physical Sciences, 0906 Electrical and Electronic Engineering, Applied Physics, 4009 Electronics, sensors and digital hardware, 4016 Materials engineering