ITEM METADATA RECORD
Title: Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors
Authors: Ritzenthaler, Romain
Schram, Tom
Spessot, Alessio
Caillat, Christian
Na, Hoon Jo
Lee, Sun Ghil
Son, Yunik
Noh, Kyung Bong
Aoulaiche, Marc
Arimura, Hiroaki
Horiguchi, Naoto
Fazan, Pierre
Thean, Aaron
Issue Date: 2014
Host Document: IEEE Workshop On Microelectronics And Electron Devices - WMED pages:1-4
Conference: IEEE Workshop On Microelectronics And Electron Devices - WMED location:Boise, ID USA date:2014-04-18
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science