IEEE Workshop On Microelectronics And Electron Devices - WMED, Date: 2014/01/01 - 2014/01/04, Location: Boise, ID USA
Publication date:
2014-01-01
Publisher:
IEEE
IEEE Workshop On Microelectronics And Electron Devices - WMED
Author:
Ritzenthaler, Romain
Schram, Tom ; Spessot, Alessio ; Caillat, Christian ; Na, Hoon Jo ; Lee, Sun Ghil ; Son, Yunik ; Noh, Kyung Bong ; Aoulaiche, Marc ; Arimura, Hiroaki ; Horiguchi, Naoto ; Fazan, Pierre ; Thean, Aaron
Keywords:
Science & Technology, Technology, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Engineering, Science & Technology - Other Topics, Alumina capping, Arsenic ion Implantation, DRAM periphery transistors, La capping