SPIE Advanced Lithography Conference: Advanced Etch Technology for Nanopatterning II, Date: 2013/01/24 - 2013/01/02, Location: San Francisco, CA USA

Publication date: 2013-01-01

Author:

de Marneffe, Jean-Francois
Lukaszewicz, Mikolaj ; Heyne, Markus ; Zhang, Liping ; Baklanov, Mikhaïl