SPIE Advanced Lithography Conference: Advanced Etch Technology for Nanopatterning II, Date: 2013/01/24 - 2013/01/02, Location: San Francisco, CA USA
Publication date:
2013-01-01
Author:
de Marneffe, Jean-Francois
Lukaszewicz, Mikolaj ; Heyne, Markus ; Zhang, Liping ; Baklanov, Mikhaïl