Author:

Keywords:

Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, nano force, adhesion, NEMS, logic gate, van der Waals, PULL-IN

Abstract:

This paper presents a rigorous design approach for (NanoElectroMechanical Structures/Systems) NEMS relays taking generalized nano-forces, e.g., Casimir, van der Waals, into account for their static and dynamic modelling. Key in our approach is the proper definition of the critical pull-in and pull-out conditions as well as the derived non-latching and non-self-actuation conditions, thus improving on previous works that used simplified models and approximated designs.We extend the consistent description of the quasi-static actuation of NEMS devices in presence of nano-forces and present adimensional formulas describing their dynamic actuation in presence of multi-electrode. In particular, we demonstrate the use of these developments to dimension an inverter and a NAND gate in a configuration dominated by the Van der Walls interaction.