Journal Of Micro-Nanolithography Mems And Moems
Publication date:
2022-04-01
Volume:
21
Publisher:
Society of Photo-optical Instrumentation Engineers
Author:
Severi, Joren
Lorusso, Gian F ; De Simone, Danilo ; Moussa, Alain ; Saib, Mohamed ; Duflou, Rutger ; De Gendt, Stefan
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Optics, Engineering, Science & Technology - Other Topics, Materials Science, CDSEM metrology, chemically amplified resist, extreme ultraviolet lithography, high NA EUVL, 0205 Optical Physics, 0906 Electrical and Electronic Engineering, 4009 Electronics, sensors and digital hardware