Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publication date:
2022-07-01
Volume:
40
DOI:
10.1116/6.0001726
Publisher:
AIP Publishing
Author:
de Marneffe, J-F
Marinov, D ; Goodyear, A ; Wyndaele, P-J ; St. J. Braithwaite, N ; Kundu, S ; Asselberghs, I ; Cooke, M ; De Gendt, S
Keywords:
Science & Technology, Technology, Physical Sciences, Materials Science, Coatings & Films, Physics, Applied, Materials Science, Physics, MOS2, DEPOSITION, HFO2, 02 Physical Sciences, 09 Engineering, Applied Physics, 40 Engineering, 51 Physical sciences