IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM, Date: 2015/01/01 - 2015/01/05, Location: Grenoble France

Publication date: 2015-01-01
Pages: 173 - 176
ISSN: 978-1-4673-7356-2
Publisher: IEEE

IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM

Author:

Wen, Liang Gong
Yamashita, Fumiko ; Tang, Baojun ; Croes, Kristof ; Tahara, Shigeru ; Shimoda, Keiichi ; Maeshiro, Takeru ; Nishimura, Eiichi ; Lazzarino, Frederic ; Ciofi, Ivan ; Boemmels, Juergen ; Tokei, Zsolt

Keywords:

Science & Technology, Technology, Engineering, Electrical & Electronic, Engineering, INTERFACE