IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM, Date: 2015/01/01 - 2015/01/05, Location: Grenoble France
Publication date:
2015-01-01
Pages:
173 -
176
ISSN:
978-1-4673-7356-2
Publisher:
IEEE
IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM
Author:
Wen, Liang Gong
Yamashita, Fumiko ; Tang, Baojun ; Croes, Kristof ; Tahara, Shigeru ; Shimoda, Keiichi ; Maeshiro, Takeru ; Nishimura, Eiichi ; Lazzarino, Frederic ; Ciofi, Ivan ; Boemmels, Juergen ; Tokei, Zsolt
Keywords:
Science & Technology, Technology, Engineering, Electrical & Electronic, Engineering, INTERFACE