ULSI Process Integration. Proceedings of the First International Symposium; Symposium held in Honolulu, Hawaii at the 196th Meet, Date: 1999/10/17 - 1999/10/22, Location: Leuven Belgium
Publication date:
1999-01-01
Volume:
99
Pages:
231 -
241
ISSN:
1-56677-241-9
Publisher:
ELECTROCHEMICAL SOCIETY INC
ULSI PROCESS INTEGRATION
Author:
Badenes, Gonçal
Rooyackers, Rita ; Augendre, Emmanuel ; Vandamme, Ewout ; Perello, Carles ; Heylen, Nancy ; Grillaert, Joost ; Deferm, Ludo ; Claeys, CL ; Iwai, H ; Bronner, G ; Fair, R
Keywords:
Science & Technology, Technology, Physical Sciences, Computer Science, Hardware & Architecture, Electrochemistry, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Computer Science, Engineering, Materials Science