International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, Date: 2015/01/01 - 2015/01/04, Location: Dresden Germany
Publication date:
2015-01-01
Author:
Hoenicke, Philipp
Detlefs, Blanka ; Fleischmann, Claudia ; Vandervorst, Wilfried ; Mueller, Matthias ; Nolot, Emmanuel ; Grampeix, Helen ; Beckhoff, Burkhard