International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, Date: 2009/04/26 - 2009/04/26, Location: Napa, CA USA
Publication date:
2009-01-01
Proceedings of the International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
Author:
Petersen, Dirch H
Hansen, Ole ; Hansen, Torben M ; Boggild, Peter ; Lin, Rong ; Kjaer, Daniel ; Nielsen, Peter F ; Clarysse, Trudo ; Vandervorst, Wilfried ; Rosseel, Erik ; Bennett, Nick S ; Cowern, Nick EB