Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, Date: 2009/04/26 - 2009/04/26, Location: Napa, CA USA

Publication date: 2009-01-01

Proceedings of the International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Author:

Bogdanowicz, Janusz

Dortu, Fabian ; Clarysse, Trudo ; Vandervorst, Wilfried ; Rosseel, Erik ; Nguyen, Duy ; Shaughnessy, Derrick ; Salnick, Alex ; Nicolaides, Lena