International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, Date: 2009/04/26 - 2009/04/26, Location: Napa USA
Publication date:
2009-01-01
Pages:
218 -
224
Proceedings of the International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
Author:
Rosseel, Erik
Bogdanowicz, Janusz ; Clarysse, Trudo ; Vandervorst, Wilfried ; Ortolland, Claude ; Hoffmann, Thomas Y ; Salnik, Alex ; Han, Sang-Hyun ; Nicolaides, Lena