High resolution dopant/carrier profiling for deep submicron technologies
Publication date:
1999-01-01
Author:
Vandervorst, Wilfried
Clarysse, Trudo ; De Wolf, Peter ; Eyben, Pierre ; Haegeman, Bart ; Xu, Mingwei ; Trenkler, Thomas ; Hantschel, Thomas ; Stephenson, Robert ; Conard, Thierry ; De Witte, Hilde