3rd International Conference Materials for Microelectronics; 16-17 October 2000; Dublin, Ireland.
Publication date:
2000-01-01
Pages:
85 -
88
Author:
Nakabayashi, M
Ikegami, M ; Ohyama, Hidenori ; Kobauashi, K ; Yoneoka, M ; Simoen, Eddy ; Claeys, Cor ; Takami, Y ; Sunaga, H ; Takizawa, H