Proceedings of the 4th International Symposium on High Purity Silicon; October 6-11, 1996; San Antonio, TX, USA., Date: 1996/10/06 - 1996/10/11, Location: TX, SAN ANTONIO
Publication date:
1996-01-01
Volume:
96
Pages:
439 -
449
ISSN:
1-56677-156-0
Publisher:
ELECTROCHEMICAL SOCIETY INC
PROCEEDINGS OF THE FOURTH INTERNATIONAL SYMPOSIUM ON HIGH PURITY SILICON
Author:
Gaubas, Eugenijus
Vanhellemont, Jan ; Simoen, Eddy ; Claeys, Cor ; Clauws, P ; Kraner, HW ; Vilkelis, G ; Claeys, CL ; Stallhofer, P ; RaiChoudhury, P ; Maurtis, JE
Keywords:
Science & Technology, Physical Sciences, Technology, Electrochemistry, Engineering, Electrical & Electronic, Materials Science, Characterization & Testing, Engineering, Materials Science