Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions

Bargallo Gonzalez, Mireia; Simoen, Eddy; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Caymax, Matty; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, SG; Wise, Rick; Claeys, Cor

E-MRS Spring Meeting Symposium I: Silicon and germanium Issues for Future CMOS Devices, Date: 2009/06/08 - 2009/06/08, Location: Strasbourg France

Publication date: 2009-01-01

Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions

Author:

Bargallo Gonzalez, Mireia

Simoen, Eddy ; Hikavyy, Andriy ; Verheyen, Peter ; Loo, Roger ; Caymax, Matty ; Machkaoutsan, Vladimir ; Tomasini, Pierre ; Thomas, SG ; Wise, Rick ; Claeys, Cor