International Symposium of Integration of MEMS and Intelligent Electronics, Date: 2008/08/23 - 2008/08/23, Location: Japan
Publication date:
2008-01-01
Pages:
63 -
65
Proceedings of the International Symposium of Integration of MEMS and Intelligent Electronics
Author:
Ohyama, Hidenori
Nagano, Takashi ; Takakurairo, Kenichiro ; Midorikawa, Masahiko ; Kuboyama, Satoshi ; Bargallo Gonzalez, Mireia ; Simoen, Eddy ; Claeys, Cor