Advanced Metallization Conference 2005, Location: Leuven Belgium
Publication date:
2006-01-01
Pages:
603 -
606
Author:
Zhang, Wenqi
Brongersma, Sywert ; Van Aelst, Joke ; Richard, Olivier ; Bamal, Mandeep ; Heylen, Nancy ; Li, Yunlong ; Beyer, Gerald ; Maex, Karen