Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures
Publication date:
2015-01-01
Volume:
33
DOI:
10.1116/1.4917168
Publisher:
Published for the Society by the American Institute of Physics
Author:
Samara, Vladimir
de Marneffe, Jean-Francois ; El Otell, Ziad ; Economou, Demetre
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, 0401 Atmospheric Sciences, 0901 Aerospace Engineering, 0912 Materials Engineering, Applied Physics, 4016 Materials engineering, 5104 Condensed matter physics