Advanced strategies for ultra-clean silicon surfaces cleaning technology and the effect of metal contamination
Publication date:
1999-01-01
Author:
Heyns, Marc
Bearda, Twan ; Cornelissen, Ingrid ; De Gendt, Stefan ; Loewenstein, Lee ; Mertens, Paul ; Mertens, S ; Meuris, Marc ; Schaekers, Marc ; Teerlinck, Ivo ; Vos, Rita ; Wolke, K