SID, Date: 2011/09/19 - 2011/09/22, Location: Arcachon, France

Publication date: 2011-01-01
Pages: 85 - 88
ISSN: 9781618396006

Proc. 31th International Display Research Conference, Society for Information Display

Author:

Beernaert, R
Avci, A ; De Smet, J ; De Coster, J ; Witvrouw, Ann ; De Smet, H

Abstract:

Recently we presented a SiGe MEMS technology compatible with underlying CMOS. In this technology micromirrors were demonstrated employing a novel electromechanical PWM driving method. We now report optimized driving waveforms that implement the driving scheme using only CMOS compatible voltages.