SID, Date: 2011/09/19 - 2011/09/22, Location: Arcachon, France
Publication date:
2011-01-01
Pages:
85 -
88
ISSN:
9781618396006
Proc. 31th International Display Research Conference, Society for Information Display
Author:
Beernaert, R
Avci, A ; De Smet, J ; De Coster, J ; Witvrouw, Ann ; De Smet, H
Abstract:
Recently we presented a SiGe MEMS technology compatible with underlying CMOS. In this technology micromirrors were demonstrated employing a novel electromechanical PWM driving method. We now report optimized driving waveforms that implement the driving scheme using only CMOS compatible voltages.