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Abstract:

In this work, a nanometre accurate spindle error motion separation technique is proposed and validated. This new measurement method is the result of an elaborate error analysis of the Donaldson reversal, Grejda reversal and the multiprobe technique. The principle is in fact an improvement of the multiprobe technique. The measurement angles of the multiprobe technique are optimized, as this method suffers from suppressed harmonic components. Experimental tests show the sub-nanometre measurement uncertainty and repeatability as well as the effectiveness of the proposed spindle error motion separation technique. The influence of the measurement angles on the measured radial error motion and artifact form error is examined.