Transistor strain measurement techniques and their applications
Publication date:
2016-01-01
Pages:
207 -
376
ISSN:
978-981-4745-08-6
Publisher:
Pan Stanford Publishing Pte. Ltd.; Singapore
Author:
Kuhn, Markus
Cea, Stephen ; Zhang, Jiong ; Wormington, Matthew ; Nuytten, Thomas ; De Wolf, Ingrid ; Zuo, Jian-Min ; Rouviere, Jean-Luc ; Ma, Zhiyong ; Seiler, David G
Keywords:
strain, transistor, Science & Technology, Technology, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Instruments & Instrumentation, Engineering, Science & Technology - Other Topics, BEAM ELECTRON-DIFFRACTION, X-RAY-DIFFRACTION, LATTICE-PARAMETER MEASUREMENT, MICRO-RAMAN SPECTROSCOPY, BACKSCATTER DIFFRACTION, SEMICONDUCTOR-DEVICES, STRESS MEASUREMENTS, SUB-ANGSTROM, ZONE-AXIS, SILICON MICROSTRUCTURES