61st IEEE International Reliability Physics Symposium (IRPS), Date: 2023/03/26 - 2023/03/30, Location: CA, Monterey
Publication date:
2023-01-01
Volume:
978-1-6654-5672-2
Publisher:
IEEE
2023 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS
Author:
Panarella, L
Kaczer, B ; Smets, Q ; Verreck, D ; Schram, T ; Cott, D ; Lin, D ; Tyaginov, S ; Asselberghs, I ; de la Rosa, C Lockhart ; Kar, GS ; Afanas'ev, V
Keywords:
2D materials, AL2O3, Engineering, Engineering, Electrical & Electronic, Engineering, Multidisciplinary, high-k gate dielectrics, nanoelectronics, Physical Sciences, Physics, Physics, Applied, reliability engineering, Science & Technology, semiconductor device reliability, Technology