Micro and Nano Engineering
Publication date:
2023-06-01
Volume:
19
Publisher:
Elsevier BV
Author:
Joshi, Sanjog Vilas
Sadeghpour, Sina ; Kraft, Michael
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Materials Science, Physics, Piezoelectric thin films, PZT, Piezo-MEMS, MEMS speaker, Earphone