Title: Automatic-analysis of ISS - spectra
Authors: Creemers, Claude ×
Royer, D
Schryvers, P #
Issue Date: Mar-1993
Publisher: John wiley & sons ltd
Series Title: Surface and interface analysis vol:20 issue:3 pages:233-242
Abstract: Ion scattering spectroscopy (ISS) is an established technique for the analysis of atomic species in the outermost atomic layer of a solid surface. Owing to the erosive action of the primary ions, a continued experiment can show the variation of these elemental concentrations in the subsurface layer, just as in depth profiling with AES or XPS and ion sputtering. When used in this 'depth profiling' mode, large numbers of spectra are generated that call for automatic processing and interpretation.
ISSN: 0142-2421
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Process Engineering for Sustainable Systems Section
× corresponding author
# (joint) last author

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