Title: Basic structures for photonic integrated circuits in silicon-on-insulator
Authors: Bogaerts, Walter ×
Taillaert, D
Luyssaert, B
Dumon, P
Van Campenhout, J
Bienstman, P
Van Thourhout, D
Baets, R
Wiaux, V
Beckx, S #
Issue Date: Apr-2004
Publisher: Optical soc amer
Series Title: Optics express vol:12 issue:8 pages:1583-1591
Abstract: For the compact integration of photonic circuits, wavelength-scale structures with a high index contrast are a key requirement. We developed a fabrication process for these nanophotonic structures in Silicon-on-insulator using CMOS processing techniques based on deep UV lithography. We have fabricated both photonic wires and photonic crystal waveguides and show that, with the same fabrication technique, photonic wires have much less propagation loss than photonic crystal waveguides. Measurements show losses of 0.24dB/mm for photonic wires, and 7.5dB/mm for photonic crystal waveguides. To tackle the coupling to fiber, we studied and fabricated vertical fiber couplers with coupling efficiencies of over 21%. In addition, we demonstrate integrated compact spot-size converters with a mode-to-mode coupling efficiency of over 70%. (C) 2004 Optical Society of America.
ISSN: 1094-4087
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Nuclear Engineering
× corresponding author
# (joint) last author

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