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Title: Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
Authors: Paci, D ×
Mastrangeli, Massimo
Nannini, A
Pieri, F #
Issue Date: Aug-2006
Publisher: Springer
Series Title: Analog integrated circuits and signal processing vol:48 issue:1 pages:41-47
Abstract: Three different kinds of two-port flexural resonators, with both clamped and free ends, and with nominal resonance frequencies between 5 MHz and 50 MHz, were designed and fabricated. Among them, a novel free-free third-mode resonator, as well as a tunable free-free resonator, designed to maintain a high quality factor despite its tunability, are presented. Because of reduced energy loss in the clamps, higher quality factors are expected from free-free devices.
URI: 
ISSN: 0925-1030
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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