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Title: Thin layer thickness measurements based on the acousto-optic technique
Authors: Devolder, S ×
Wevers, Martine
De Meester, Paul
Leroy, Oswald #
Issue Date: Mar-1996
Publisher: Amer inst physics
Series Title: Applied Physics Letters vol:68 issue:12 pages:1732-1734
Abstract: The acousto-optic technique presented by Wevers, Devolder, Leroy, and De Meester [Appl. Phys. Lett. 66, 1466 (1995)] was based on the information concerning the phase shift between the incident and the reflected ultrasound at critical angles. Two laser beams were used, one being diffracted by the incident ultrasound, the other being diffracted by the reflected ultrasound. Information concerning the geometrical shape of the sample as well as information concerning the thickness of a thin layer could be obtained from measurements in the near-field of the light diffraction. In this letter it is shown that using only one laser beam, traveling through the intersection region of both ultrasounds, exact thickness information of the layer can be obtained. Theoretical calculations are derived and compared with practical measurements for a 3 mu m copper layer on a stainless-steel plate. (C) 1996 American Institute of Physics.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Research Center Accountancy, Leuven
Faculty of Science, Campus Kulak Kortrijk
× corresponding author
# (joint) last author

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