Title: Phase composition of Cr-C thin films deposited by a double magnetron sputtering system
Authors: Groudeva-Zotova, S ×
Vitchev, RG
Blanpain, Bart #
Issue Date: Aug-2000
Publisher: John wiley & sons ltd
Series Title: Surface and interface analysis vol:30 issue:1 pages:544-548
Abstract: Non-reactive d.c. magnetron sputtering by two magnetron sources with inclined geometry was used for deposition of Cr-C thin films with C:Cr ratio in the range 0.08-2.40. The phase composition of the films was investigated by x-ray diffraction, XPS, SEM and resistivity measurements. Four phase compositional regions were distinguished in the investigated large compositional range: films containing mainly microcrystalline Cr or Cr-C solid solution; films containing both the microcrystalline Cr phase and the stoichiometric Cr23C6 carbide phase (beta-phase); amorphous-like films composed of the ultradisperse Cr crystalline phase and different metastable carbides; and amorphous films consisting of a carbon matrix with a limited amount of a high-carbon carbide phase dispersed in it, The films from the first two regions exhibit very high microhardness and good wear resistivity, and at the same time a relatively low electrical resistivity, which make them promising coating materials for electronic applications. Copyright (C) 2000 John Wiley & Sons, Ltd.
ISSN: 0142-2421
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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