Title: Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography
Authors: Bogaerts, Walter ×
Wiaux, V
Taillaert, D
Beckx, S
Luyssaert, B
Bienstman, P
Baets, R #
Issue Date: Jul-2002
Publisher: Ieee-inst electrical electronics engineers inc
Series Title: IEEE journal of selected topics in quantum electronics vol:8 issue:4 pages:928-934
Abstract: We demonstrate wavelength-scale photonic nanostructures, including photonic crystals, fabricated in silicon-on-insulator using deep ultraviolet (UV) lithography. We discuss the mass-manufacturing capabilities of deep UV lithography compared to e-beam lithography. This is illustrated with experimental results. Finally, we present some of the issues that arise when trying to use established complementary metal-oxide-semiconductor processes for the fabrication of photonic integrated circuits.
ISSN: 1077-260X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Nuclear Engineering
× corresponding author
# (joint) last author

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