Title: Special section on issues related to semiconductor manufacturing at technology nodes below 70 nm
Authors: Singh, R. ×
Doering, R.R.
Koike, H.
Kim, K.
Heyns, Marc #
Issue Date: May-2002
Publisher: Ieee-inst electrical electronics engineers inc
Series Title: IEEE Transactions on semiconductor manufacturing vol:15 issue:2 pages:133-136
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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