Title: The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution
Authors: Loewenstein, L.M. ×
Mertens, P.
Heyns, Marc #
Issue Date: 2001
Publisher: Scitec publications ltd
Series Title: Ultra clean processing of silicon surfaces 2000 vol:76-77 pages:7-8
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science